Mechanical Microsensors.pdf

Mechanical Microsensors PDF

Remco Wiegerink

This books provides a comprehensive description of the principles of sensors for mechanical quantities fabricated by silicone micromachining. Since sensordesign and sensor fabrication requires work in an interdisciplinary field, carried out by engineers trained in various disciplines, the presentation is made accessible to engineers trained in electrical and mechanical engineering, physics and chemistry. Accordingly, the basic science needed for the design of mechanical microsensors is discussed starting from a fairly elementary level, including scaling of physical laws, mechanics of deformation of beams and diaphragms, transducer principles, the basics of fluid flow and heat transfer and electronic circuits. The reader is introduced into the basics of silicon micromachining and sensor packaging. Relevant issues regarding design, fabrication and performance are illustrated in numerous examples for pressure sensors, force sensors, accelerometers, gyroscopes and flow sensors.

Mechanical Microsensors - M Elwenspoek, Remco J … "Mechanical Microsensors provides a comprehensive description of the various design techniques required for silicon micromachining of sensors. This is a very well written book which has a pleasant balance of mathematical, physics and engineering principles, that make this book suitable for physicists, chemistry, electrical and mechanical engineers."

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9783540675822 ISBN
Mechanical Microsensors.pdf


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Sofya Voigtuh

Mechanical Characterization of PDMS Films for the ...

Mattio Müllers

Mechanical Microsensors Professor Dr. Miko Elwenspoek, Dr. Remco Wiegerink (auth.) Fabrication technologies related to those which are exploited for the fabrication of integrated circuits can be used to machine mechanical structures with minimum feature sizes in the range of micrometers. The mechanical machining of silicon based on IC-technologies is known as micromachining, and the systems

Noels Schulzen

Mechanical Microsensors - Achat / Vente livre Springer ... Découvrez Mechanical Microsensors ainsi que les autres livres de au meilleur prix sur Cdiscount. Livraison rapide ! Livraison rapide ! En poursuivant votre navigation, vous acceptez l'utilisation, de la part de Cdiscount et de tiers, de cookies et autres traceurs à des fins de mesure d'audience, partage avec les réseaux sociaux, personnalisation des contenus, profilage et publicité ciblée.

Jason Leghmann

Achetez et téléchargez ebook Mechanical Microsensors (Microtechnology and MEMS) (English Edition): Boutique Kindle - Electricity Principles :

Jessica Kolhmann

Mechanical microsensors. Elwenspoek, M. (Miko), 1948-; Wiegerink, Remco J., 1964-This book on mechanical microsensors is based on a course organized by the Swiss Foundation for Research in Microtechnology (FSRM) in Neuchatel, Swit­ zerland, and developed and taught by the authors. Support by FSRM is herewith gratefully acknowledged. This book attempts to serve two purposes. First it gives an